[[Optical Component]] Systems and methods for preventing or reducing contamination enhanced laser induced damage (c-lid) to optical components using gas phase additives

Systems and methods for preventing or reducing contamination enhanced laser induced damage (C-LID) to optical components are provided including a housing enclosing an optical component, a container configured to hold a gas phase additive and operatively coupled to the housing; and a delivery system configured to introduce the gas phase additive...



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