In a MEMS device (1), a first drive portion (40) is divided into a first drive section (41) and a second drive section (42). A second drive portion (50) is divided into a third drive section (51) and a fourth drive section (52). The first drive section, the second drive section,...
source Optical Component patent applications http://ift.tt/1seJJmK
via
source Optical Component patent applications http://ift.tt/1seJJmK
via
No comments:
Post a Comment