[[Optical Component]] System and method for protecting a seed laser in an euv light source with a bragg aom

A method and apparatus for protecting the seed laser in a laser produced plasma (LPP) extreme ultraviolet (EUV) light system are disclosed in one embodiment, a Bragg AOM is used as a switch on the beam path from the seed laser to other optical components and ultimately to an irradiation site....



source Optical Component patent applications http://www.freshpatents.com/-dt20131205ptan20130322482.php

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