A method for manufacturing a light transmissive optical component, includes a first etching process of forming a depressed portion by applying etching to a silicon region of a plate-shaped member, a thermal oxidation process of forming a silicon oxide film by thermally oxidizing an inner side surface of the depressed portion,...
source Optical Component patent applications http://ift.tt/1r7dB5j
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source Optical Component patent applications http://ift.tt/1r7dB5j
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