An objective for a projection exposure apparatus includes a metrology stage arranged on the frame of the objective. The objective includes at least one optical component, an objective mount for mounting the optical component, and a positioning device for holding at least one measuring device. The positioning device is connected to...
source Optical Component patent applications http://ift.tt/1rU9eJc
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source Optical Component patent applications http://ift.tt/1rU9eJc
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