An inspection system includes optical components for operating the inspection system in an interference fringe imaging mode and a microscope imaging mode. The inspection system further includes at least one optical light source configured to emit a first wavelength of light to operate the inspection system in the interference fringe imaging...
source Optical Component patent applications http://ift.tt/1sOeFJL
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source Optical Component patent applications http://ift.tt/1sOeFJL
via
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