An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein...
source Optical Component patent applications http://ift.tt/1xno4xJ
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source Optical Component patent applications http://ift.tt/1xno4xJ
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